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  • 신규설비  > Spin Etcher
  • NexGen Spin Etcher

BrandARCADIA

  • ο Wet Etch and Clean / Photo resist removal / Bevel etch and clean /
  •  Underbump metallization etch
  • ο Film Removal : Poly, Oxide, Nitride, Clean, SC1, SC2, DiO3+DHF+DHCL
  • ο Si Etch : Wafer thinning, Stress relief, Surface conditioning
Description